JPH0341928U - - Google Patents

Info

Publication number
JPH0341928U
JPH0341928U JP10245489U JP10245489U JPH0341928U JP H0341928 U JPH0341928 U JP H0341928U JP 10245489 U JP10245489 U JP 10245489U JP 10245489 U JP10245489 U JP 10245489U JP H0341928 U JPH0341928 U JP H0341928U
Authority
JP
Japan
Prior art keywords
gas
exhaust
exhaust chamber
core tube
control plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10245489U
Other languages
English (en)
Japanese (ja)
Other versions
JP2523938Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989102454U priority Critical patent/JP2523938Y2/ja
Publication of JPH0341928U publication Critical patent/JPH0341928U/ja
Application granted granted Critical
Publication of JP2523938Y2 publication Critical patent/JP2523938Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1989102454U 1989-08-31 1989-08-31 拡散炉の排気装置 Expired - Lifetime JP2523938Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989102454U JP2523938Y2 (ja) 1989-08-31 1989-08-31 拡散炉の排気装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989102454U JP2523938Y2 (ja) 1989-08-31 1989-08-31 拡散炉の排気装置

Publications (2)

Publication Number Publication Date
JPH0341928U true JPH0341928U (en]) 1991-04-22
JP2523938Y2 JP2523938Y2 (ja) 1997-01-29

Family

ID=31651350

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989102454U Expired - Lifetime JP2523938Y2 (ja) 1989-08-31 1989-08-31 拡散炉の排気装置

Country Status (1)

Country Link
JP (1) JP2523938Y2 (en])

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61190929A (ja) * 1985-02-20 1986-08-25 Hitachi Ltd 処理装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61190929A (ja) * 1985-02-20 1986-08-25 Hitachi Ltd 処理装置

Also Published As

Publication number Publication date
JP2523938Y2 (ja) 1997-01-29

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